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Microresonators, filters, and clocks, with a specific focus on piezoelectric MEMS Optical MEMS
For pressure sensors and strain gauges.
Practical work : Draw cross-sections for bulk micromachining (KOH etching) vs. surface micromachining (sacrificial oxide etching). Identify undercut issues and anchor design rules. practical mems ville kaajakari pdf work
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: Moving beyond fabrication to focus on physical operation principles and deriving design equations. practical mems ville kaajakari pdf work